5 Phase Stepper Controller
Repair Service
ENLARGEDescription:
Details:
5 Phase Stepper Controller
Details:5 Phase Stepper Controller
P/N:
0100-90172
✔ New sale
Flight Tube Assembly
xR80 VME Rack
Comsumable Parts
P/N Description 0020-89586 LlNER END CATHODE DIA 16 0020-86740 LlNER END ANTICATHODE 0021-90036 RETAINER HOOK 0021-90787 FRONTPLATE R/H R650 0020-98941 Shield Magent 0021-90298 FILAMENT SHIELD 0020-83953 APERTURE PLATE 0020-82832 BEAM STOP 0020-86455 COOLING TUBE 0020-82803 COVER PLATE SOURCE 0020-97885 POST MRS SLIT 0020-99490 COVER GRAPHITE 0020-83666 ELECTRODE EH4 0020-82054 ARC CHAMBER REMOTE INS PFS 0020-82035 INSULATOR PLASMA HEAD 0020-05662 GUIDE TUBE APERTURE 0020-80634 SHIELD GUIDE TUBE TOP 0020-80635 SHIELD GUIDE TUBE SIDE 0020-83418 GAS SEAL BOR NIT 0020-80632 SHIELD GUIDE TUBE SIDE 0020-85053 TOP SHIELD (VITREOUS) 0020-80633 SHIELD GUIDE TUBE SIDE 0020-84907 FRONTPLATE,L/H 0020-84743 FRONTPLATE,R/H 0020-81226 SLEEVE, OVEN NOZZLE 0020-85074 PLUG, ARC CHAMBER, SDS 0020-83172 LINER, CLAMP PLATE 0020-82474 GRAPHITE, SHIELD 55X94 0020-98788 ELECTRODE, SUPPRESSION 0020-98787 ELECTRODE, GROUND 0020-98877 INSERT, OUTER 0020-98879 INSERT, NEUTRAL 0020-98878 INSERT, INNER 0020-83924 PRE MRS SLIT 0020-82810 VANE, MRS 0020-83925 POST MRS SLIT 0020-83927 ELECTRODE, EH1 0020-83926 ELECTRODE, EH0 0020-83962 ELECTRODE, EH-1 0021-90020 INSULATOR, TYPE SM7 0021-90299 GUIDE TUBE SIDE, RIGHT 0021-90438 GUIDE TUBE TOP 0021-90439 GUIDE TUBE BOTTOM 0021-90307 ARC CHAMBER 0021-90441 APERTURE PLATE 0020-89171 SUPPORT, GUlDE TUBE 0021-90365 GUIDE TUBE PLATE 0021-90440 GUIDE TUBE MAGNET RET. 3420-90096 INSULATOR 0020-82834 SHIELDING, END 0020-82833 SHIELDING, SIDE 1030-90022 MAGNET, SOURCE 0021-06597 FILAMENT INSULATOR 0020-80682 ELECTRODE, EH4 0020-98366 MOUNTING, EH3 0020-91798 CUP FARADAY 0020-97557 INSULATOR
45W & 65W Power Supply
Gripper arm cable
Blade Motor Potentiometer (with Enhanced kit)
Wafer loader door open / close sensor kit
Blade, ceramic
