VAT 075 Slit Valve - Door Cover 遮氣罩
適用於AMAT Producer Actuator Valve & AIBT IMP L/L Door Valve
P/N: 50085062
✔ Sale 販售
改善VAT 075系列 Slit valve door piston leak issue:
- Individual release path, help engineer to identify damaged piston.
- Limited air release path and direction, prevent wafer pollution
when piston leak.
- Easy to install/de-install.
After installation:
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