Parts for sale
Repair Service
Wafer loader door open / close sensor kit
Blade, ceramic
Potentiometer (Transfer arm)
Filter-Cartridge (W/L chamber)
Moving clips (for CIP wheel)
N2 vent valve pipeline
Ion source oven
Scan shaft ballscrew
5 Phase Stepper Controller
Flight Tube Assembly
xR80 VME Rack
Comsumable Parts
P/N Description 0020-89586 LlNER END ...45W & 65W Power Supply
Gripper arm cable
Blade Motor Potentiometer (with Enhanced kit)