Parts for sale
Service Item
9500xR Flight Tube
xR80 Flight Tube
Quantum Flight Tube
5 Phase Stepper Controller
Scan shaft ballscrew
Heatsink
Moving clips 200mm
Wafer loader door open/close sensor kit
Wafer loader door cylinder
Potentiometer (Blade Motor) (with Enhanced kit)
Potentiometer (Transfer arm)
Filter-Cartridge (W/L chamber)
Gripper arm cable
45W & 65W Power Supply
Shield Top Hat (Extraction)
xR80 VME Rack
Blade, ceramic 200mm
N2 vent valve pipeline
