Assembly repair
Repair & Service item
Wheel Assembly
Tilt motor assembly (0-7 degree)
AMAT Gas Module (Gas panel)
Hollow Gripper Arm
Cassette indexer assembly
Batch Notch Orient Assy (BNO Head)
Heatsink
Water Pump
9500xR Extraction
xR80 Extraction
Quantum Extraction
Carousel (150/200mm)
Moving Clips
MRS Assembly
Ferrofluid seal
Beam Profiler
Blade Assy
Wafer Clip Actuator
Plasma Flood Gun Assy (HDPFS)
Ion Source Head
Cassette Tray 200mm
Argon Bleed Kit Air Box (PFS Ar Box)
