Spare parts
Repair & Service item
ABB EH 370 Contactor
Pre-Accel 60kV converter
Farnell Hivolt PA Converter
60kV Transformer
Cryo pump auto N2 purge box
Sensor box
X-Y Displacement and Splitter box
Door shock absorber
Ion source body
Thermocouple Gauge (TC Gauge)
Pirani vacuum gauge
ESP DC UPS
Isolation transformer
Source isolation transformer
Target chamber power supply
AMAT 150MM Wheel Parts
9500xR Flight Tube
xR80 Flight Tube
Quantum Flight Tube
5 Phase Stepper Controller
Scan shaft ballscrew
Heatsink
Moving clips 200mm
Wafer loader door open/close sensor kit
Wafer loader door cylinder
Potentiometer (Blade Motor) (with Enhanced kit)
Potentiometer (Transfer arm)
Filter-Cartridge (W/L chamber)
Gripper arm cable
45W & 65W Power Supply
Shield Top Hat (Extraction)
Ion source oven
xR80 VME Rack
Blade, ceramic 200mm
N2 vent valve pipeline
