AMU Coil Replacement

Description:

AMU Coil Replacement

Details:
To solve AMAT analyzing magnet replacing issue:
- Replace the AMU coil in tight space between tools.
  解決因機台間隔狹小而難以更換AMU Coil的問題
- Remove less part of roof panels and assemblies.
  只需拆除部分區域的屋頂面板與周邊零件
- Reduce the tool downtime.
  大幅縮短復機時間

History 實績

AMAT 9500xR, xR80, Quantum (Contact us for other model.)